A state-backed company in Shanghai has started small-batch production of domestically made immersion deep ultraviolet, or DUV, lithography machines, according to The Information. The report said the company plans to ship about five units this year and raise annual deliveries to around 20 by 2027. The first batch is set to go to Semiconductor Manufacturing International Corp. (SMIC), Hua Hong Semiconductor and ChangXin Memory Technologies.
Before the tools can be used more broadly, fabs will need to verify their precision, stability and how well they connect with existing production lines. That validation process could take several months or longer. The report added that most parts in the system have been localized, though some critical components still rely on Japan.
The same report said the overall performance and manufacturing quality of the domestic machines still trail ASML. For comparison, ASML delivered about 131 immersion DUV lithography systems in 2025 alone, showing that a large-scale replacement of foreign equipment remains some distance away.
A Shanghai state-backed company has begun small-batch production of domestically developed immersion deep ultraviolet lithography machines, according to The Information. The report said the company plans to ship about five units this year and increase that figure to around 20 in 2027.
First batch earmarked for three chipmakers
The first set of machines will be delivered to Semiconductor Manufacturing International Corp. (SMIC), Hua Hong Semiconductor and ChangXin Memory Technologies. The report said fabs will need to test the tools for precision, stability and compatibility with existing production lines, and that process could last several months or even longer.
Most parts localized, but some key components still sourced from Japan
According to the report, most components in the equipment have already been localized. Some critical parts, however, still depend on Japan. The report also said the machines remain behind ASML in overall performance and manufacturing quality.
Gap remains wide against ASML shipment scale
ASML delivered about 131 immersion DUV lithography machines in 2025 alone, the report said. That comparison suggests domestic equipment is still some distance from replacing foreign systems at scale.
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