A Chinese company backed by state capital has begun mass production of domestically developed deep ultraviolet lithography manufacturing equipment, according to The Information, which cited people familiar with the matter. The company plans to produce about five DUV lithography machines in 2026 and scale that figure to roughly 20 in 2027. The report frames the move as a notable step in China’s push to localize semiconductor manufacturing equipment.
The planned customers for the first batch include major Chinese chipmakers Semiconductor Manufacturing International Corp. (SMIC), Hua Hong Semiconductor and memory maker ChangXin Memory Technologies (CXMT). Among them, CXMT is expected to be an important early user of advanced domestic semiconductor equipment. The report also noted the production gap with ASML, saying the Dutch supplier delivered 131 immersion DUV lithography systems last year. If the Chinese-made DUV tools can run stably on production lines at companies such as CXMT, the report said, China’s memory chip industry could reduce its reliance on overseas critical equipment.
A Chinese company backed by state capital has started mass production of domestically developed DUV, or deep ultraviolet, lithography manufacturing equipment, according to The Information, which cited people familiar with the matter.
The company plans to produce about five DUV lithography machines in 2026 and raise output to roughly 20 in 2027, the report said. It described the development as a fresh sign of China’s effort to localize key parts of the semiconductor supply chain.
The production scale still trails ASML. The report said the Dutch lithography supplier delivered 131 immersion DUV lithography systems last year.
People familiar with the matter said the first batch of the Chinese-made DUV tools is planned for delivery to major domestic chipmakers, including Semiconductor Manufacturing International Corp. (SMIC), Hua Hong Semiconductor and memory chip producer ChangXin Memory Technologies (CXMT). Among them, CXMT, presented in the report as a representative company in China’s DRAM industry, is expected to be an important user of advanced domestic semiconductor manufacturing equipment.
If the locally made DUV systems can operate stably on production lines at companies such as CXMT, the report said, China’s memory chip sector would be able to cut reliance on critical overseas equipment.
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